「微量水分管理において、露点温度と体積混合比(ppb/ppm)の正確な把握は不可欠です。本ページでは、1気圧下における換算値を一覧表にまとめました。半導体プロセスや高純度ガス、ドライルームの管理における計算の手間を省き、現場での迅速な判断をサポートします。」
換算表(露点ーppm/v)
【計算条件】
圧力: 大気圧(1,013.25 hPa)
単位: 体積比(vol) ※質量比ではありません
算出: Wexler-Sonntag式に基づく
| 露点 [℃dp] | 水分量 [ppbV] | 水分量 [ppmV] |
|---|---|---|
| -100 | 13.8 | 0.0138 |
| -99 | 17.0 | 0.0170 |
| -98 | 20.7 | 0.0207 |
| -97 | 25.3 | 0.0253 |
| -96 | 30.7 | 0.0307 |
| -95 | 37.3 | 0.0373 |
| -94 | 45.2 | 0.0452 |
| -93 | 54.7 | 0.0547 |
| -92 | 66.0 | 0.0660 |
| -91 | 79.4 | 0.0794 |
| -90 | 95.5 | 0.0955 |
| -89 | 114.6 | 0.1146 |
| -88 | 137.2 | 0.1372 |
| -87 | 163.9 | 0.1639 |
| -86 | 195.4 | 0.1954 |
| -85 | 232.5 | 0.2325 |
| -84 | 276.3 | 0.2763 |
| -83 | 327.6 | 0.3276 |
| -82 | 387.8 | 0.3878 |
| -81 | 458.3 | 0.4583 |
| -80 | 540.7 | 0.5407 |
| -79 | 636.8 | 0.6368 |
| -78 | 748.7 | 0.7487 |
| -77 | 878.9 | 0.8789 |
| -76 | 1,030 | 1.030 |
| -75 | 1,204 | 1.204 |
| -74 | 1,407 | 1.407 |
| -73 | 1,641 | 1.641 |
| -72 | 1,911 | 1.911 |
| -71 | 2,223 | 2.223 |
| -70 | 2,582 | 2.582 |
| -69 | 2,994 | 2.994 |
| -68 | 3,466 | 3.466 |
| -67 | 4,008 | 4.008 |
| -66 | 4,628 | 4.628 |
| -65 | 5,337 | 5.337 |
| -64 | 6,146 | 6.146 |
| -63 | 7,068 | 7.068 |
| -62 | 8,118 | 8.118 |
| -61 | 9,311 | 9.311 |
| -60 | 10,667 | 10.7 |
| -59 | 12,204 | 12.2 |
| -58 | 13,946 | 13.9 |
| -57 | 15,917 | 15.9 |
| -56 | 18,144 | 18.1 |
| -55 | 20,658 | 20.7 |
| -54 | 23,493 | 23.5 |
| -53 | 26,687 | 26.7 |
| -52 | 30,279 | 30.3 |
| -51 | 34,316 | 34.3 |
| -50 | 38,848 | 38.8 |
| -49 | 43,930 | 43.9 |
| -48 | 49,623 | 49.6 |
| -47 | 55,994 | 56.0 |
| -46 | 63,116 | 63.1 |
| -45 | 71,070 | 71.1 |
| -44 | 79,943 | 79.9 |
| -43 | 89,832 | 89.8 |
| -42 | 100,844 | 100.8 |
| -41 | 113,093 | 113.1 |
| -40 | 126,705 | 126.7 |
| -39 | 141,819 | 141.8 |
| -38 | 158,584 | 158.6 |
| -37 | 177,163 | 177.2 |
| -36 | 197,734 | 197.7 |
| -35 | 220,491 | 220.5 |
| -34 | 245,643 | 245.6 |
| -33 | 273,419 | 273.4 |
| -32 | 304,065 | 304.1 |
| -31 | 337,850 | 337.9 |
| -30 | 375,064 | 375.1 |
| -29 | 416,020 | 416.0 |
| -28 | 461,058 | 461.1 |
| -27 | 510,545 | 510.5 |
| -26 | 564,877 | 564.9 |
| -25 | 624,481 | 624.5 |
| -24 | 689,817 | 689.8 |
| -23 | 761,381 | 761.4 |
| -22 | 839,708 | 839.7 |
| -21 | 925,371 | 925.4 |
| -20 | 1,018,988 | 1,019.0 |
| -19 | 1,121,222 | 1,121.2 |
| -18 | 1,232,785 | 1,232.8 |
| -17 | 1,354,439 | 1,354.4 |
| -16 | 1,487,005 | 1,487.0 |
| -15 | 1,631,358 | 1,631.4 |
| -14 | 1,788,437 | 1,788.4 |
| -13 | 1,959,247 | 1,959.2 |
| -12 | 2,144,862 | 2,144.9 |
| -11 | 2,346,428 | 2,346.4 |
| -10 | 2,565,171 | 2,565.2 |
| -9 | 2,802,398 | 2,802.4 |
| -8 | 3,059,504 | 3,059.5 |
| -7 | 3,337,976 | 3,338.0 |
| -6 | 3,639,396 | 3,639.4 |
| -5 | 3,965,450 | 3,965.5 |
| -4 | 4,317,932 | 4,317.9 |
| -3 | 4,698,749 | 4,698.7 |
| -2 | 5,109,927 | 5,109.9 |
| -1 | 5,553,620 | 5,553.6 |
| 0 | 6,032,113 | 6,032.1 |
| 1 | 6,484,874 | 6,484.9 |
| 2 | 6,967,390 | 6,967.4 |
| 3 | 7,481,514 | 7,481.5 |
| 4 | 8,028,843 | 8,028.8 |
| 5 | 8,611,280 | 8,611.3 |
| 6 | 9,230,832 | 9,230.8 |
| 7 | 9,889,414 | 9,889.4 |
| 8 | 10,589,052 | 10,589.1 |
| 9 | 11,332,019 | 11,332.0 |
| 10 | 12,120,683 | 12,120.7 |
| 11 | 12,957,308 | 12,957.3 |
| 12 | 13,844,323 | 13,844.3 |
| 13 | 14,784,233 | 14,784.2 |
| 14 | 15,779,977 | 15,780.0 |
| 15 | 16,834,103 | 16,834.1 |
| 16 | 17,949,498 | 17,949.5 |
| 17 | 19,129,322 | 19,129.3 |
| 18 | 20,376,645 | 20,376.6 |
| 19 | 21,694,591 | 21,694.6 |
| 20 | 23,086,634 | 23,086.6 |